干式羅茨真空泵內氣體流動的CFD 模擬

岳向吉¹ 巴德純^1* 劉 坤¹ 王光玉² 張振厚² 陳 超¹

(1.東北大學機械工程與自動化學院 沈陽 110819；2.中國科學院沈陽科學儀器研制中心 沈陽 110168)

　　Abstract:As one key equipment, dry vacuum pump is widely used in IC industry and process industry. Due to the harsh operational conditions, complicated inner flow and thermodynamics mechanism, the design theory and product development are getting more and more attention. In this paper, based on dynamics mesh method, the 3-D transient numerical model for multi-stage dry Roots-type vacuum pump was set up, the performance parameters of vacuum pump was calculated, the flow process, phenomena, and main characteristics of flow field inside the pump were analyzed. This work provides an approach and reference for the study and analysis on design problems for multi-stage dry vacuum pump.

　　Keywords Dry Roots-type vacuum pump,Computational fluid dynamics,Dynamics mesh,Numerical simulation

　　摘要：干式真空泵作為核心裝備廣泛應用于IC 產業和流程工業。由于運行條件苛刻，內部流動和熱力學機制復雜，其設計理論和產品研發越來越受到重視。

　　本文基于動網格方法建立了多級干式羅茨真空泵的三維瞬態數值模型，計算了真空泵的性能參數，分析了泵內的流動過程、現象和流場的主要特征。為研究和分析多級干式真空泵的設計問題提供了手段和參考。

　　關鍵詞：干式羅茨真空泵 計算流體力學(CFD) 動網格 數值模擬